Development of very high frequency plasma enhanced chemical vapour deposition for nanostructure silicon carbide thin film deposition

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Bibliographic Details
Main Author:	Muhammad Firdaus Omar
Other Authors:	Abd. Kahmim Ismail, supervisor
Format:	Doctoral thesis
Language:	English
Published:	Universiti Teknologi Malaysia 2025
Subjects:	Science
Online Access:	https://utmik.utm.my/handle/123456789/51694
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