Study on The Targets for PZT Thin Films Fabrication Process Using RF Reactive Sputtering

HALIM, ABDUL KARIMI BIN (2006) Study on The Targets for PZT Thin Films Fabrication Process Using RF Reactive Sputtering. UNSPECIFIED.

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Item Type:	Other
PRISMA ID:	10117
URI:	http://oarr.uitm.edu.my/id/eprint/11913

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