Manufacturing Variation in MEMS: Fabrication of Micro Array Resonators

SAAD, NOR HAYATI BINTI (2008) Manufacturing Variation in MEMS: Fabrication of Micro Array Resonators. UNSPECIFIED.

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Item Type:	Other
PRISMA ID:	27498
URI:	http://oarr.uitm.edu.my/id/eprint/14470

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