Effect of Annealing on a-C:Nx Films Grown by Microwave Surface Wave Plasma CVD

MAHMOOD, MOHAMAD RUSOP BIN (2005) Effect of Annealing on a-C:Nx Films Grown by Microwave Surface Wave Plasma CVD. UNSPECIFIED.

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Item Type:	Other
PRISMA ID:	37054
URI:	http://oarr.uitm.edu.my/id/eprint/15634

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