Capacitance Density Comparison of PECVD Silicon Oxynitride and Silicon Nitride Dielectric for MIM Capacitor

ZOOLFAKAR, AHMAD SABIRIN BIN (2006) Capacitance Density Comparison of PECVD Silicon Oxynitride and Silicon Nitride Dielectric for MIM Capacitor. In: UNSPECIFIED.

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Item Type:	Conference or Workshop Item (UNSPECIFIED)
PRISMA ID:	3185
URI:	http://oarr.uitm.edu.my/id/eprint/17555

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