Electrical Analysis of Si3N4 Stress in Sub-90nm NMOS Device.

ABDULLAH, MOHD HANAPIAH BIN (2007) Electrical Analysis of Si3N4 Stress in Sub-90nm NMOS Device. ISSN 0973-1245

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Item Type:	Article
PRISMA ID:	15904
URI:	http://oarr.uitm.edu.my/id/eprint/3140

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