Analysis of MEMS mechanical spring for coupling multimodal micro resonators sensor

SAAD, NOR HAYATI BINTI (2007) Analysis of MEMS mechanical spring for coupling multimodal micro resonators sensor. Microelectronic Engineering, 2 (3).

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Item Type:	Article
Journal or Publication Title:	Microelectronic Engineering
PRISMA ID:	1915
URI:	http://oarr.uitm.edu.my/id/eprint/4113

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