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Effects of target surface oxidation on crystallization of YSZ film deposited by reactive sputtering on glass substrate

HERMAN, SUKREEN HANA BINTI (2010) Effects of target surface oxidation on crystallization of YSZ film deposited by reactive sputtering on glass substrate.

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Item Type: Article
PRISMA ID: 27598
URI: http://oarr.uitm.edu.my/id/eprint/5846

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