Fabrication of 30-nm-Pitched CoPt Magnetic Dot Arrays Using 30-keV-Electron Beam Lithography and Ion Milling for Patterned Media

MOHAMAD, ZULFAKRI BIN (2003) Fabrication of 30-nm-Pitched CoPt Magnetic Dot Arrays Using 30-keV-Electron Beam Lithography and Ion Milling for Patterned Media. Key Engineering Materials, 6 (1). ISSN 1511-2802

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Item Type:	Article
Journal or Publication Title:	Key Engineering Materials
PRISMA ID:	1883
URI:	http://oarr.uitm.edu.my/id/eprint/6722

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