Design and simulation of MEMS saw resonator in CMOS technology

Modern consumers require wireless and mobile telecommunication device to be small, portable, high performance and have multitasking capabilities. Miniaturization of the widely popular surface acoustic wave (SAW) resonator on a silicon chip would be highly beneficial for integrated communication circ...

وصف كامل

التفاصيل البيبلوغرافية
المؤلف الرئيسي: Noor Amalina Ramli
مؤلفون آخرون: #PLACEHOLDER_PARENT_METADATA_VALUE#
التنسيق: Master Thesis
اللغة:الإنجليزية
منشور في: Kuala Lumpur: International Islamic University Malaysia, 2013 2024
الموضوعات:
الوصول للمادة أونلاين:https://studentrepo.iium.edu.my/handle/123456789/7269
https://lib.iium.edu.my/mom/services/mom/document/getFile/kn1gSdHg3qlzoOXlf5aM14wxnWa9bG5L20140423091248077
Abstract Abstract here