Effect of focused ion beam machining parameters on geometrical accuracy of Bio-MEMS

This thesis introduced focused ion beam (FIB) micromachining as a potential technique to fabricate Bio-MEMS microfluidic devices. This work investigated the influence of three FIB process parameters, which were acceleration voltage, dwell time and milled depth. The response variables were taper angl...

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Auteur principal:	Nurul Hajar binti Mohd Fuad
Autres auteurs:	#PLACEHOLDER_PARENT_METADATA_VALUE#
Format:	Master Thesis
Langue:	anglais
Publié:	Gombak, Selangor :Kulliyyah of Engineeering, International Islamic University Malaysia, 2011 2024
Sujets:	Focused ion beams BioMEMS
Accès en ligne:	https://studentrepo.iium.edu.my/handle/123456789/7481 https://lib.iium.edu.my/mom/services/mom/document/getFile/Vsqjr0PK9QK58mzcYBIzOB4iqEvoJC8220120810085810267
Abstract	Abstract here