Design Of Spring-Supported Diaphragm Capacitive MEMS Microphone

In this research project, the design and performance optimization techniques of a microelectromechanical (MEMS) condenser microphone will be studied and described using several established plate theories and numerical analysis. MEMS microphone is shown to have been increasingly popular to be used i...

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書目詳細資料

主要作者:	Mohamad, Norizan
格式:	Thesis
語言:	英语
出版:	UTeM 2016
主題:	T Technology (General) TK Electrical engineering. Electronics Nuclear engineering
在線閱讀:	http://eprints.utem.edu.my/id/eprint/18844/1/Design%20Of%20Spring-Supported%20Diaphragm%20Capacitive%20MEMS%20Microphone%2024%20Pages.pdf