Experimental and numerical studies on a metallic pulsed capillary discharge as an Extreme Ultra-Violet (EUV) Source / Chan Li San
A system for the generation of metallic capillary discharge plasma has been developed and studied. The quartz capillary is initially evacuated to a low pressure of 10-5 mbar. The transient hollow cathode discharge (THCD) generated high energy electron beam is employed to initiate the discharge by va...
| Auteur principal: | |
|---|---|
| Format: | Thèse |
| Publié: |
2016
|
| Sujets: |