Structure, morphology, optical and electrochemical properties of indium- and aluminum-based nitride thin films deposited by plasma-assisted reactive evaporation / Mahdi Alizadeh Kouzeh Rash
A plasma-assisted reactive evaporation system was developed for the growth of indium- and aluminum-based nitride thin films. The effects of the most influential growth parameters were investigated with respect to the structure, elemental composition, morphology and optical properties of these films....
| 第一著者: | |
|---|---|
| フォーマット: | 学位論文 |
| 出版事項: |
2016
|
| 主題: |