Synthesis of stilbenes for potential application as photoacid generators in polymer film modification / Lee Jia Yin
Photo-acid generators (PAGs) are significant components for photolithography, required for polymer thin film modification in the semiconductor industry. Upon UV irradiation through a photomask, a PAG is photolysed liberating a photoacid that catalytically reacts with a photoresist polymeric matri...
| المؤلف الرئيسي: | |
|---|---|
| التنسيق: | أطروحة |
| منشور في: |
2015
|
| الموضوعات: |