Synthesis of stilbenes for potential application as photoacid generators in polymer film modification / Lee Jia Yin
Photo-acid generators (PAGs) are significant components for photolithography, required for polymer thin film modification in the semiconductor industry. Upon UV irradiation through a photomask, a PAG is photolysed liberating a photoacid that catalytically reacts with a photoresist polymeric matri...
| 主要作者: | |
|---|---|
| 格式: | Thesis |
| 出版: |
2015
|
| 主題: |