Modeling of micro-diaphragm for optical pressure sensor for human artery pulse wave detection / Khairunnisa Hasikin
This thesis presents the development of a micro-diaphragm for an optical pulse pressure sensor using Micro-electro-mechanical Systems (MEMS) technology. Modelling of the micro-diaphragm was conducted and the comparison of its performance was simulated for silicon nitride and polyirnide materials. In...
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| स्वरूप: | थीसिस |
| प्रकाशित: |
2010
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| विषय: |