The formulation of a transfer learning pipeline for the classification of the wafer defects
In a semiconductor manufacturing process, a semiconductor wafer may have defects which are unacceptable due to its complexity in manufacturing process. Defect detection in wafer is vital in avoiding yield loss in end product, which is often achieved by visual judgement using an optical microscope. T...
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| フォーマット: | 学位論文 |
| 言語: | 英語 |
| 出版事項: |
2023
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| 主題: | |
| オンライン･アクセス: | http://umpir.ump.edu.my/id/eprint/42467/1/ir.The%20formulation%20of%20a%20transfer%20learning%20pipeline%20for%20the%20classification%20of%20the%20wafer%20defects.pdf |