Finite element (quasi-static) model of electrostatic microelectromechanical cantilever
A finite element model has been developed to enable an initial assessment of the analysis of an elastic-electrostatic system of an electrostatic micromechanical cantilever (which is often referred to simply as a cantilever) for microelectromechanical systems (MEMS) design performance and evaluation....
| المؤلف الرئيسي: | |
|---|---|
| التنسيق: | أطروحة |
| اللغة: | الإنجليزية |
| منشور في: |
Universiti Malaysia Sarawak, UNIMAS
2009
|
| الموضوعات: | |
| الوصول للمادة أونلاين: | http://ir.unimas.my/id/eprint/232/ |
| Abstract | Abstract here |