Finite element (quasi-static) model of electrostatic microelectromechanical cantilever
A finite element model has been developed to enable an initial assessment of the analysis of an elastic-electrostatic system of an electrostatic micromechanical cantilever (which is often referred to simply as a cantilever) for microelectromechanical systems (MEMS) design performance and evaluation....
| 第一著者: | |
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| フォーマット: | 学位論文 |
| 言語: | 英語 |
| 出版事項: |
Universiti Malaysia Sarawak, UNIMAS
2009
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| 主題: | |
| オンライン･アクセス: | http://ir.unimas.my/id/eprint/232/ |
| Abstract | Abstract here |