Finite element (quasi-static) model of electrostatic microelectromechanical cantilever

A finite element model has been developed to enable an initial assessment of the analysis of an elastic-electrostatic system of an electrostatic micromechanical cantilever (which is often referred to simply as a cantilever) for microelectromechanical systems (MEMS) design performance and evaluation....

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Bibliographic Details
Main Author:	Lai, Adriana Mook Kim
Format:	Thesis
Language:	English
Published:	Universiti Malaysia Sarawak, UNIMAS 2009
Subjects:	TA Engineering (General). Civil engineering (General)
Online Access:	http://ir.unimas.my/id/eprint/232/
Abstract	Abstract here

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