Development Of 3D Microstructures By Using Grayscale Photolithographic Technique

Perkembangan pesat teknologi seperti bio-chip, peranti pendalir mikro, peranti mikro-optik dan sistem mikro elektro-mekanikal (MEMS) memerlukan keupayaan membina struktur tiga dimensi (3D) yang kompleks di skala mikro. Bagi membina struktur 3D di skala mikro, kebiasaannya beberapa topeng cahaya digu...

Full description

Bibliographic Details

Main Author:	Lee , Tze Pin
Format:	Thesis
Language:	English
Published:	2016
Subjects:	T Technology TJ1-1570 Mechanical engineering and machinery
Online Access:	http://eprints.usm.my/41609/