SU-8 Piezoresistive Microcantilever For Chemical Sensing Application
In this research, the ultraviolet (UV) patternable polymer material, SU-8 with very low Young’s modulus compared to conventional silicon based material, is utilized as structural material for microcantilever to enhance the piezoresistive strain. In addition to that, a thorough Finite Element Analys...
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| 格式: | Thesis |
| 語言: | 英语 |
| 出版: |
2011
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| 在線閱讀: | http://eprints.usm.my/41933/ |
| Abstract | Abstract here |