SU-8 Piezoresistive Microcantilever For Chemical Sensing Application
In this research, the ultraviolet (UV) patternable polymer material, SU-8 with very low Young’s modulus compared to conventional silicon based material, is utilized as structural material for microcantilever to enhance the piezoresistive strain. In addition to that, a thorough Finite Element Analys...
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| Format: | Thèse |
| Langue: | anglais |
| Publié: |
2011
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| Accès en ligne: | http://eprints.usm.my/41933/ |