SU-8 Piezoresistive Microcantilever For Chemical Sensing Application

In this research, the ultraviolet (UV) patternable polymer material, SU-8 with very low Young’s modulus compared to conventional silicon based material, is utilized as structural material for microcantilever to enhance the piezoresistive strain. In addition to that, a thorough Finite Element Analys...

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Bibliographic Details
Main Author:	Lee, Kok Siong
Format:	Thesis
Language:	English
Published:	2011
Subjects:	QD1-999 Chemistry
Online Access:	http://eprints.usm.my/41933/
Abstract	Abstract here

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