SU-8 Piezoresistive Microcantilever For Chemical Sensing Application
In this research, the ultraviolet (UV) patternable polymer material, SU-8 with very low Young’s modulus compared to conventional silicon based material, is utilized as structural material for microcantilever to enhance the piezoresistive strain. In addition to that, a thorough Finite Element Analys...
| 第一著者: | |
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| フォーマット: | 学位論文 |
| 言語: | 英語 |
| 出版事項: |
2011
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| 主題: | |
| オンライン･アクセス: | http://eprints.usm.my/41933/ |