Development Of Tetragonal Zirconia Thin Film For Semiconductor Application

In this work, the YSZ and Nb-YSZ film were produced by using chemical solution deposition (CSD) technique via dip coating. The films were deposited on two different substrates (silica glass and Si wafer). Various parameters were conducted in this study including numbers of coatings, concentration of...

书目详细资料
主要作者:	Chan, Pooi Quan
格式:	Thesis
语言:	英语
出版:	2011
主题:	TN1-997 Mining engineering. Metallurgy
在线阅读:	http://eprints.usm.my/43232/

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