Fabrication, Characterization And Humidity Sensing Properties Of Radio Frequency Magnetron Sputtered Calcium Copper Titanate (CCTO) Thin Film.
Resistance-type humidity sensor based on CCTO thin films which are capable of sensing of humidity in the range of 30%-90% and short period of time have been successfully fabricated by using radio frequency (RF) magnetron sputtering technique. The CCTO thin film humidity sensor based-on resistance me...
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| Format: | Thesis |
| Language: | English |
| Published: |
2018
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| Online Access: | http://eprints.usm.my/56071/ |
| Abstract | Abstract here |