Fabrication, Characterization And Humidity Sensing Properties Of Radio Frequency Magnetron Sputtered Calcium Copper Titanate (CCTO) Thin Film.

Resistance-type humidity sensor based on CCTO thin films which are capable of sensing of humidity in the range of 30%-90% and short period of time have been successfully fabricated by using radio frequency (RF) magnetron sputtering technique. The CCTO thin film humidity sensor based-on resistance me...

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Bibliographic Details
Main Author:	Ahmadipour, Mohsen
Format:	Thesis
Language:	English
Published:	2018
Subjects:	T Technology TN Mining Engineering. Metallurgy
Online Access:	http://eprints.usm.my/56071/
Abstract	Abstract here

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