Design, Fabrication And Performance Analysis Of Su-8 Piezoresistive Micro Pressure Sensor
In this thesis, su-8 piezoresistive micro pressure sensor is designed, modeled and fabricated, and its performance is characterized. As piezoresistive micro pressure sensor is commonly fabricated using silicon, many issues and challenges such as selection of piezoresistor material, release method...
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| Format: | Thesis |
| Language: | English |
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2012
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| Online Access: | http://eprints.usm.my/63834/ |
| Abstract | Abstract here |