Design, Fabrication And Performance Analysis Of Su-8 Piezoresistive Micro Pressure Sensor
In this thesis, su-8 piezoresistive micro pressure sensor is designed, modeled and fabricated, and its performance is characterized. As piezoresistive micro pressure sensor is commonly fabricated using silicon, many issues and challenges such as selection of piezoresistor material, release method...
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| Format: | Thesis |
| Language: | English |
| Published: |
2012
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| Subjects: | |
| Online Access: | http://eprints.usm.my/63834/ |
| Abstract | Abstract here |
| Summary: | In this thesis, su-8 piezoresistive micro pressure sensor is designed, modeled
and fabricated, and its performance is characterized. As piezoresistive micro
pressure sensor is commonly fabricated using silicon, many issues and challenges
such as selection of piezoresistor material, release method and sensitivity
enhancement need to be tackled in order to develop successful su-8 piezoresistive
micro pressure sensor. The novelty of this research focuses on integrating micro
pressure sensor with su-8/silver composite (su-81ag) as piezoresistor, ohp
transparency as substrate and novel dry release method as release protocol. Su-8 is
selected as structural material for micro pressure sensor due to its low cost and easy
to fabricate. Besides, the low young's modulus of su-8 provides better sensitivity
compared to silicon. Analytical method using small deflection theories of plate and
fmite element analysis (fea) via ansys® are carried out to characterize the
diaphragm thickness. Both methods show thickness at 147j.1m provides optimum
sensitivity and linearity for 6000j.1m square su-8 diaphragm. Fea is also applied to
find the most suitable geometry and the best location of piezoresistors for improved
sensitivity. A simple and low cost protocol is established to fabricate su-8 based
pressure sensor. |
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