Design, Fabrication And Performance Analysis Of Su-8 Piezoresistive Micro Pressure Sensor

In this thesis, su-8 piezoresistive micro pressure sensor is designed, modeled and fabricated, and its performance is characterized. As piezoresistive micro pressure sensor is commonly fabricated using silicon, many issues and challenges such as selection of piezoresistor material, release method...

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Bibliographic Details
Main Author:	Wong, Wah Seng
Format:	Thesis
Language:	English
Published:	2012
Subjects:	QC1 Physics (General)
Online Access:	http://eprints.usm.my/63834/
Abstract	Abstract here

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