Silterra cleaning solution in post chemical mechanical polishing oxide to minimize ammoniacal nitrogen in effluent

Malaysia’s Department of Environment (DOE) has introduced ammoniacal nitrogen as a new parameter to be regulated under the Environment Quality (Industrial Effluents) Act effective from 1st January 2010. The penalty for not complying to any provision of the Environmental Quality Act (EQA) is a fine n...

全面介紹

書目詳細資料

主要作者:	Said, Muhammad Asyraf
格式:	Thesis
語言:	英语 英语
出版:	2023
主題:	T Technology (General) TK Electrical engineering. Electronics Nuclear engineering
在線閱讀:	http://eprints.utem.edu.my/id/eprint/28300/ https://plh.utem.edu.my/cgi-bin/koha/opac-detail.pl?biblionumber=123812
Abstract	Abstract here