Silterra cleaning solution in post chemical mechanical polishing oxide to minimize ammoniacal nitrogen in effluent

Malaysia’s Department of Environment (DOE) has introduced ammoniacal nitrogen as a new parameter to be regulated under the Environment Quality (Industrial Effluents) Act effective from 1st January 2010. The penalty for not complying to any provision of the Environmental Quality Act (EQA) is a fine n...

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書誌詳細

第一著者:	Said, Muhammad Asyraf
フォーマット:	学位論文
言語:	英語 英語
出版事項:	2023
主題:	T Technology (General) TK Electrical engineering. Electronics Nuclear engineering
オンライン･アクセス:	http://eprints.utem.edu.my/id/eprint/28300/ https://plh.utem.edu.my/cgi-bin/koha/opac-detail.pl?biblionumber=123812
Abstract	Abstract here