Silterra cleaning solution in post chemical mechanical polishing oxide to minimize ammoniacal nitrogen in effluent

Malaysia’s Department of Environment (DOE) has introduced ammoniacal nitrogen as a new parameter to be regulated under the Environment Quality (Industrial Effluents) Act effective from 1st January 2010. The penalty for not complying to any provision of the Environmental Quality Act (EQA) is a fine n...

وصف كامل

التفاصيل البيبلوغرافية
المؤلف الرئيسي:	Said, Muhammad Asyraf
التنسيق:	أطروحة
اللغة:	الإنجليزية الإنجليزية
منشور في:	2023
الموضوعات:	T Technology (General) TK Electrical engineering. Electronics Nuclear engineering
الوصول للمادة أونلاين:	http://eprints.utem.edu.my/id/eprint/28300/ https://plh.utem.edu.my/cgi-bin/koha/opac-detail.pl?biblionumber=123812
Abstract	Abstract here

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