Silterra cleaning solution in post chemical mechanical polishing oxide to minimize ammoniacal nitrogen in effluent

Malaysia’s Department of Environment (DOE) has introduced ammoniacal nitrogen as a new parameter to be regulated under the Environment Quality (Industrial Effluents) Act effective from 1st January 2010. The penalty for not complying to any provision of the Environmental Quality Act (EQA) is a fine n...

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Bibliographic Details
Main Author:	Said, Muhammad Asyraf
Format:	Thesis
Language:	English English
Published:	2023
Subjects:	T Technology (General) TK Electrical engineering. Electronics Nuclear engineering
Online Access:	http://eprints.utem.edu.my/id/eprint/28300/ https://plh.utem.edu.my/cgi-bin/koha/opac-detail.pl?biblionumber=123812
Abstract	Abstract here

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