Azali, M. M. (2022). Optimization of vhf-pecvd deposition parameters for silicon carbide film using in-situ and in-line gas phase analysis.
Chicagoスタイル(17版)引用形式Azali, Muhamad Muizzudin. Optimization of Vhf-pecvd Deposition Parameters for Silicon Carbide Film Using In-situ and In-line Gas Phase Analysis. 2022.
MLA(9版)引用形式Azali, Muhamad Muizzudin. Optimization of Vhf-pecvd Deposition Parameters for Silicon Carbide Film Using In-situ and In-line Gas Phase Analysis. 2022.
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