Conduction mechanisms in diamond-like carbon thin films prepared by PECVD method

The aim of this study is to prepare thin films of diamond-like carbon (a-C:H) and to determine the conduction mechanisms in the diamond-like carbon thin films. Diamond-like carbon (a-C:H) thin films were deposited on corning glass substrates using PECVD method. The samples were fabricated in Al/a-C:...

全面介紹

書目詳細資料
主要作者: Ab. Kaderld, Mohd. Azamnie
格式: Thesis
語言:英语
出版: 2010
主題:
在線閱讀:http://eprints.utm.my/16336/1/MohdAzamnieAbdMFSA2010.pdf