Structural and optical properties of nanocrystalline silicon thin films grown by 150MHz VHF-PECVD

Nanocrystalline silicon thin film is a promising material potentially used in the optoelectronic field due to its improved and unique properties. In this work, nanocrystalline silicon thin films were grown by using a 150MHz VHF-PECVD to study the effect of deposition times, substrate temperatures an...

Description complète

Détails bibliographiques
Auteur principal:	Tarjudin, Nurul Aini
Format:	Thèse
Langue:	anglais
Publié:	2012
Sujets:	Q Science (General)
Accès en ligne:	http://eprints.utm.my/32428/5/NurulAiniTarjudinMFS2012.pdf

Documents similaires

Investigation on morphology and structural properties of 2D carbon nanostructure grown via 150 MHz PECVD
par: Hasanudin, Muhammad Akmal
Publié: (2015)

Optical properties measurements of nanocrystalline silicon thin films
par: Gan, Chee Hong
Publié: (2011)

Optimization of vhf-pecvd deposition parameters for silicon carbide film using in-situ and in-line gas phase analysis
par: Azali, Muhamad Muizzudin
Publié: (2022)

Structural properties of hydrogenated amorphous silicon (A-SI:H) thin film grown via radio frequency plasma enhanced chemical vapor deposition (RF PECVD)
par: Anthony Hasbi, Hasbullah
Publié: (2005)

Structural And Optical Properties Of Sputtered Nanocrystalline Indium Nitride On Silicon Substrates
par: Amirhoseiny, Maryam
Publié: (2013)

Conduction mechanisms in diamond-like carbon thin films prepared by PECVD method
par: Ab. Kaderld, Mohd. Azamnie
Publié: (2010)

Synthesis and characterization of nanocrystalline silicon thin films on teflon substrates by RF magnetron sputtering / Norhidayatul Hikmee Mahzan
par: Hikmee Mahzan, Norhidayatul
Publié: (2015)

Layer-by-layer plasma enhanced chemical vapour deposition of nanocrystalline silicon thin films / Goh Boon Tong
par: Goh, Boon Tong
Publié: (2012)

UV-Vis characterization of diamond-like carbon thin films deposited using (DC-PECVD)
par: Ab. Rahman, Nur Alifah
Publié: (2010)

Time dependence of morphological and optical properties of DC sputtering grown copper oxide thin film
par: Sulaiman, Rosmaizatul Akma
Publié: (2014)

The structural and optical properties of hydrogenated amorphous carbon (a-C:H) thin films deposited using a direct current-plasma enhanced chemical vapour deposition (DC-PECVD) technique
par: Abu Bakar, Suriani
Publié: (2005)

Hydrophobic, structural and optical properties of zinc silica thin films
par: Aziz, Nur Aimi Syaqilah
Publié: (2013)

Hydrophobic, structural and optical properties of zinc silica thin films
par: Aziz, Nur Aimi Syaqilah
Publié: (2013)

Structural, Electrical, And Optical Properties Of Indium Nitride Thin Films
par: Ganie, Umar Bashir
Publié: (2018)

Synthesis And Characterization Of Nanocrystalline Cds Thin Films By Microwave-Assisted Chemical Bath Deposition For Photodetectors Application
par: Mohammed Ali, Mohammed Husham
Publié: (2015)

Analysis of surface intergrity and tool wear during machining high thermal conductivity steel 150 (HTCS- 150)
par: Wan Mohd Yusoff, Wan Mohd Azahar
Publié: (2018)

Space charge limited current conduction in nanocrystalline silicon nanofilms
par: Mohd. Tajudin, Mohd. Nadzreen Haizam
Publié: (2010)

Phase change analysis of crystalline silicon thin film grown by very high frequency - plasma enhanced chemical vapour deposition and radio frequency - magnetron sputtering
par: Rosman, Nor Hariz Kadir
Publié: (2020)

Development of nanocrystalline thick film gas sensors
par: Abadi, Mohammad Hadi Nezhad Shahrokh
Publié: (2010)

Crystallization of polycrystalline silicon thin film by excimer laser annealing
par: Ab. Razak, Siti Noraiza
Publié: (2011)

Structural and optical properties of RF-sputtered Ge thin films using magnetron sputtering technique
par: Ariffin, Nurul Assikin
Publié: (2018)

Structural and optical properties of silicon carbide quantum dots grown by very high frequency plasma enhanced chemical vapour deposition
par: Jusoh, Haezah Munyati
Publié: (2020)

Structural and optical properties of strontium titanate thin films prepared by spray pyrolysis
par: Mat, Siti Aisah
Publié: (2014)

Structure and optical properties of multi-phase structured amorphous silicon carbon nitride thin films deposited by plasma enhanced chemical vapour deposition / Mohd Azam Abdul Rahman
par: Mohd Azam , Abdul Rahman
Publié: (2018)

The effect of substrate temperature on the structural and optical properties of diamond-like carbon thin film
par: Sarmid, Suriany
Publié: (2007)

Effect Of Indium Doping On Structural, Optical And Electrical Properties Of Zinc Oxide Thin Films
par: Md Aznan, Nornani
Publié: (2016)

Cu2ZnSnS4 (CZTS) Thin Film Grown By Electrochemical Deposition For Solar Cell
par: Mrzog, Elmoiz Marghni Mkawi
Publié: (2015)

Size-controlled the gold nanoparticles on silicon suboxide film grown by vapor deposition techniques / Chan Kee Wah
par: Chan, Kee Wah
Publié: (2012)

Development of nanocrystalline cellulose/graphene oxide based composite thin film for metal ions detection using surface plasmon resonance spectroscopy
par: Mohd Daniyal, Wan Mohd Ebtisyam Mustaqim
Publié: (2022)

Structural And Optical Properties Of AlxInyGa1-x-yN Thin Films
par: Abed, Muslim A.
Publié: (2012)

Studying The Fabrication Of Thin Film Silicon Solar Cell On Polymeric And Glass Substrate
par: Ang , Pun Chong
Publié: (2016)

Thin Film Silicon Solar Cell Prepared By Thermal Evaporation On Polyimide Substrate
par: Pakhuruddin, Mohd Zamir
Publié: (2012)

Neodymium oxide thin film gate oxide on silicon substrate / Hetherin Karuppiah
par: Hetherin , Karuppiah
Publié: (2018)

Electrical and optical properties of tin sulphide thin films
par: deraman, karim
Publié: (1997)

The formation, structural and optical properties of silicon nanocrystals embedded in silicon dioxide
par: Yeong, Wai Woon
Publié: (2008)

Growth Of Alxga1-Xn Thin Films On Silicon Using Sol-Gel Spin Coating Technique
par: Isa, Nurul Atikah Mohd
Publié: (2018)

A1GaN Thin Films On Silicon Substrates For Photodetector And Transistor Devices
par: Hussein, Asaad Shakir
Publié: (2011)

Investigation Of Metal Organic Deposition Derived Cerium Oxide Thin Films On Silicon Wafer
par: Jasni, Farah Anis
Publié: (2009)

Imporved characteristics of optimized YTTRIA-stabilized zirconia thin film grown using sol-gel dip-coating technique
par: Mohd. Rahimi, Nur Fathirah
Publié: (2023)

A Discrete Distributed Power Amplifier For VHF To UHF.
par: Tan, Teik Siew
Publié: (2008)