Structural and optical properties of nanocrystalline silicon thin films grown by 150MHz VHF-PECVD

Nanocrystalline silicon thin film is a promising material potentially used in the optoelectronic field due to its improved and unique properties. In this work, nanocrystalline silicon thin films were grown by using a 150MHz VHF-PECVD to study the effect of deposition times, substrate temperatures an...

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Auteur principal:	Tarjudin, Nurul Aini
Format:	Thèse
Langue:	anglais
Publié:	2012
Sujets:	Q Science (General)
Accès en ligne:	http://eprints.utm.my/32428/5/NurulAiniTarjudinMFS2012.pdf