Structural and optical properties of nanocrystalline silicon thin films grown by 150MHz VHF-PECVD
Nanocrystalline silicon thin film is a promising material potentially used in the optoelectronic field due to its improved and unique properties. In this work, nanocrystalline silicon thin films were grown by using a 150MHz VHF-PECVD to study the effect of deposition times, substrate temperatures an...
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| フォーマット: | 学位論文 |
| 言語: | 英語 |
| 出版事項: |
2012
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| オンライン･アクセス: | http://eprints.utm.my/32428/5/NurulAiniTarjudinMFS2012.pdf |