Structural and optical properties of nanocrystalline silicon thin films grown by 150MHz VHF-PECVD

Nanocrystalline silicon thin film is a promising material potentially used in the optoelectronic field due to its improved and unique properties. In this work, nanocrystalline silicon thin films were grown by using a 150MHz VHF-PECVD to study the effect of deposition times, substrate temperatures an...

全面介绍

书目详细资料
主要作者: Tarjudin, Nurul Aini
格式: Thesis
语言:英语
出版: 2012
主题:
在线阅读:http://eprints.utm.my/32428/5/NurulAiniTarjudinMFS2012.pdf

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