Investigation on morphology and structural properties of 2D carbon nanostructure grown via 150 MHz PECVD

A 150 MHz very high frequency plasma enhanced chemical vapor deposition (150 MHz VHF-PECVD) system was utilized to fabricate two-dimensional carbon nanostructure from the mixture of CH4 and H2. Morphology and structural properties of the grown nanostructure were investigated by means of microscopic...

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Détails bibliographiques

Auteur principal:	Hasanudin, Muhammad Akmal
Format:	Thèse
Langue:	anglais
Publié:	2015
Sujets:	QC Physics
Accès en ligne:	http://eprints.utm.my/54011/25/MuhammadAkmalHasanudinMFS2015.pdf