Investigation on morphology and structural properties of 2D carbon nanostructure grown via 150 MHz PECVD
A 150 MHz very high frequency plasma enhanced chemical vapor deposition (150 MHz VHF-PECVD) system was utilized to fabricate two-dimensional carbon nanostructure from the mixture of CH4 and H2. Morphology and structural properties of the grown nanostructure were investigated by means of microscopic...
| 第一著者: | |
|---|---|
| フォーマット: | 学位論文 |
| 言語: | 英語 |
| 出版事項: |
2015
|
| 主題: | |
| オンライン･アクセス: | http://eprints.utm.my/54011/25/MuhammadAkmalHasanudinMFS2015.pdf |