Simulation, fabrication and characterization of NMOS transistor
This thesis explains the recipe module development for the first Long Channel NMOS transistor device fabrication process at cleanroom laboratory of KUiTTHO. A recipe for the NMOS transistor fabrication process has been successfully produced. Threshold Voltage and Leakage Current, with different...
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| Format: | Thesis |
| Language: | English English English |
| Published: |
2006
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| Online Access: | http://eprints.uthm.edu.my/7107/ |
| Abstract | Abstract here |