Simulation, fabrication and characterization of NMOS transistor

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This thesis explains the recipe module development for the first Long Channel NMOS transistor device fabrication process at cleanroom laboratory of KUiTTHO. A recipe for the NMOS transistor fabrication process has been successfully produced. Threshold Voltage and Leakage Current, with different...

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Bibliographic Details
Main Author:	Rifai, Damhuji
Format:	Thesis
Language:	English English English
Published:	2006
Subjects:	TK Electrical engineering. Electronics Nuclear engineering TK7800-8360 Electronics
Online Access:	http://eprints.uthm.edu.my/7107/
Abstract	Abstract here

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