An investigation of physical processes in nanosphere lithography

Various physical processes have been investigated in order to improve the Nanosphere Lithography (NSL) technique by modifying the nanosphere structures. Polysytrene CPS) nanospheres used in NSL can be modified in three schemes: Electron beam, heat and chemical manipulation techniques. The most...

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Bibliographic Details
Main Author:	Agam, Mohd Arif
Format:	Thesis
Language:	English
Published:	2006
Subjects:	TA Engineering (General). Civil engineering (General) TA401-492 Materials of engineering and construction. Mechanics of materials
Online Access:	http://eprints.uthm.edu.my/7348/
Abstract	Abstract here

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