Fabrication, characterization and optimization of in-house MOSFET transistor using spin on dopant technique
This thesis explains the development and fabrication of first in-house MOSFET device using spin -on dopant technique at KUKUM Microfahrication Cleanroom. The process started with the establishment of process flow, process modules, and process parameters. Four modules were developed. The charac...
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| Format: | Thèse |
| Langue: | anglais anglais anglais |
| Publié: |
2004
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| Accès en ligne: | http://eprints.uthm.edu.my/7661/ |
| Abstract | Abstract here |