Fabrication, characterization and optimization of in-house MOSFET transistor using spin on dopant technique

This thesis explains the development and fabrication of first in-house MOSFET device using spin -on dopant technique at KUKUM Microfahrication Cleanroom. The process started with the establishment of process flow, process modules, and process parameters. Four modules were developed. The charac...

وصف كامل

التفاصيل البيبلوغرافية
المؤلف الرئيسي:	Morsin, Marlia
التنسيق:	أطروحة
اللغة:	الإنجليزية الإنجليزية الإنجليزية
منشور في:	2004
الموضوعات:	TK Electrical engineering. Electronics Nuclear engineering TK7800-8360 Electronics
الوصول للمادة أونلاين:	http://eprints.uthm.edu.my/7661/
Abstract	Abstract here

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