Pencirian elektrik dan bahan bagi peranti CMOS 0.15 mikron

Satu kajian untuk mengukur pencirian bagi peranti CMOS dengan panjang get (Le) 0.15 mikron telah dijalankan. Analisa bagi pencirian clektrik dilaksanakan menggunakan Sistem Penguk.llran CV-IV manakala analisa bagi pencirian bahan pula dilaksanakan menggunakan Fokus Alur Ion (FIB), Mikroskopi P...

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Bibliographic Details
Main Author:	Sulong, Muhammad Suhaimi
Format:	Thesis
Language:	English
Published:	2005
Subjects:	TK Electrical engineering. Electronics Nuclear engineering TK7800-8360 Electronics
Online Access:	http://eprints.uthm.edu.my/7967/
Abstract	Abstract here

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