Fabrication and characterisation of ion sensitive capacitor for integrated sensors system

Also available in printed version : TK7871.15 M64 2012 raf

Bibliographic Details
Main Author:	Mohd. Rofei Mat Hussin
Other Authors:	Razali Ismail, supervisor
Format:	Master's thesis
Published:	Universiti Teknologi Malaysia 2025
Subjects:	Silicon
Online Access:	https://utmik.utm.my/handle/123456789/104390
Abstract	Abstract here

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