Nanoscale microstructural characterization of aluminum and copper bilayer thin films deposited on silicon substrate using magnetron sputtering technique

Also available in printed version : QC176.83 Z853 2014 raf

Bibliographic Details
Main Author:	Zulhelmi Alif Abdul Halim
Other Authors:	Muhamad Azizi Mat Yajid, supervisor
Format:	Master's thesis
Published:	Universiti Teknologi Malaysia 2025
Subjects:	Thin films
Online Access:	https://utmik.utm.my/handle/123456789/104524
Abstract	Abstract here

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