Nanoscale microstructural characterization of aluminum and copper bilayer thin films deposited on silicon substrate using magnetron sputtering technique

Also available in printed version : QC176.83 Z853 2014 raf

書誌詳細
第一著者: Zulhelmi Alif Abdul Halim
その他の著者: Muhamad Azizi Mat Yajid, supervisor
フォーマット: Master's thesis
出版事項: Universiti Teknologi Malaysia 2025
主題:
オンライン・アクセス:https://utmik.utm.my/handle/123456789/104524
Abstract Abstract here