High fidelity simulation models for equipment performance prediction in semiconductor industry

Also available in printed version : HD30.2 A594 2014 raf

Bibliographic Details
Main Author:	Anwar Ali Vali Mohamed
Other Authors:	Awaluddin Mohamed Shaharoun, supervisor
Format:	Doctoral thesis
Language:	English
Published:	Universiti Teknologi Malaysia 2025
Subjects:	Information technology > Management Industrial management > Data processing
Online Access:	https://utmik.utm.my/handle/123456789/115780
Abstract	Abstract here

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